Technics Ion Mill Etch Rates Chart

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Technics Ion Mill Etch Rates
Material
Rate (Å/min.)
Material
Rate (Å/min)
Ag
100
Nb
20
Al
35
Ni
30
Al/Cu
5
NiCr
10
Al2O3
5
NiFe
20
Au
90
NiFeCo
5
AZ 1350 J
15
No
20
Bi
430
Pb
155
C
5
PbTe
150
CdS
50
Pd
50
Co
30
PMMA
20
Cr
20
Pt
45
CrSi
5
Rb
200
Cu
50
Re
25
Er
45
Ru
30
Fe
25
Sb
160
FeO
35
Si
20
GaAs
115
SiC
15
GaP
70
SiO2
25
GaSb
85
Si3N4 LPCVD
5
Ge
45
Sn
70
InSb
60
Th
35
Ir
30
Ti
10
LiNbO3
25
V
20
Mn
45
W
15
Note: This table uses ~80mA Ion Beam Current and 100 accelerating volts.
Values rounded to nearest 5 Å/min.

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